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The clean room can also be called dust free room. It is the special designed room, in which the pollutants in the air such as micro particle, harmful gas and bacterium are removed away and the room characteristics must be controlled in a certain level, such as temperature, cleanliness, the pressure in the chamber, airflow velocity and distribution, noise, vibration, illumination and static electricity.

No matter how the external air conditions change, the interior of the clean room can still keep the original set level of properties including cleanliness, temperature, humidity, pressure and others. The main function of the clean room is to control the cleanliness, temperature and humidity of the air of the environment that the product such as silicon chip stays in. Then, the product can be produced in a good environment.

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