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Suspended Particles Count of Clean Room
FS 209E ISO 14644-1
Maximum Allowable Limit Value of Particle Concentration (≥D)Pc/m3 Allowable Limit Value of Particle Concentration(≥D)Pc/m3
Particle Diameter (um) Level 0.1 0.2 0.3 0.5 5.0 Particle Diameter (um) Level 0.1 0.2 0.3 0.5 1.0 5.0
ISO1 10 2
ISO2 100 24 10 4
M1 350 (9.91) 75.7(2.14) 30.9(0.875) 10(0.283)
M1.5 1240(35) 265(7.5) 106(3) 35.3(1.0) ISO3 1000 237 102 35 8
M2 3500(99.1) 757(21.4) 309(8.75) 100(2.83)
M2.5 12400(350) 2650(75) 1060(30) 353(10) ISO4 10,000 2370 1020 352 83
M3 35,000(991) 7570(214) 3090(87.5) 1000(28.3)
M3.5(100) 26,500(750) 10600(300) 3530(100) ISO5 100,000 23700 10,200 3520 832 29
M4 75,700(2140) 30900(875) 10,000(283)
M4.5(1000) 35300(1000) 247(7) ISO6 1,000,000 23,7000 102,000 35,200 8320 293
M5 100,000(2830) 618(17.5)
M5.5(10000) 353,000(10,000) 2470(70) ISO7 352,000 83,200 2930
M6 1,000,000(28,300) 6180(175)
M6.5(100000) 3,530,000(100,000) 24,700(700) ISO8 3,520,000 832,000 29,300
M7 10,000,000(283,000) 61,800(1750)
ISO9 35,200,000 8,320,000 293,000

Note
1. The number in the brackets is the British imperial particle concentration with the unit of Pc/ft3.
2. The name for the table with ISO 14644-1 should be The Selected Clean Room Suspended Particle Cleanliness Level according to the standard.

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